dc.contributor.author |
Sargentis, C |
en |
dc.contributor.author |
Giannakopoulos, K |
en |
dc.contributor.author |
Travlos, A |
en |
dc.contributor.author |
Tsamakis, D |
en |
dc.date.accessioned |
2014-03-01T02:49:20Z |
|
dc.date.available |
2014-03-01T02:49:20Z |
|
dc.date.issued |
2003 |
en |
dc.identifier.uri |
https://dspace.lib.ntua.gr/xmlui/handle/123456789/34534 |
|
dc.title |
Process and device characteristics of Pd nanocrystals MOS memory |
en |
heal.type |
conferenceItem |
en |
heal.identifier.primary |
10.1109/ISDRS.2003.1272068 |
en |
heal.identifier.secondary |
http://dx.doi.org/10.1109/ISDRS.2003.1272068 |
en |
heal.publicationDate |
2003 |
en |
heal.abstract |
In this work we describe the fabrication of a MOS memory with embedded palladium nanocrystals within a SiO2 layer. For the deposition of Pd nanocrystals we used the MBE method. Only a few studies have been devoted to metal nanocrystals, as memory elements, although they have many advantages in comparsion to semiconductor nanocrystals. |
en |
heal.journalName |
Semiconductor Device Research International Symposium |
en |
dc.identifier.doi |
10.1109/ISDRS.2003.1272068 |
en |