Nanolaminate Deformable Mirrors

Papavasiliou, A; Olivier, S; Barbee, T; Miles, R; Walton, C; Cohn, M; Chang, K

dc.contributor.author	Papavasiliou, A	en
dc.contributor.author	Olivier, S	en
dc.contributor.author	Barbee, T	en
dc.contributor.author	Miles, R	en
dc.contributor.author	Walton, C	en
dc.contributor.author	Cohn, M	en
dc.contributor.author	Chang, K	en
dc.date.accessioned	2014-03-01T02:50:16Z
dc.date.available	2014-03-01T02:50:16Z
dc.date.issued	2006	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/35008
dc.subject	Deformable Mirror	en
dc.subject	Electrostatic Actuator	en
dc.subject	Electrostatic Force	en
dc.title	Nanolaminate Deformable Mirrors	en
heal.type	conferenceItem	en
heal.identifier.primary	10.1109/OMEMS.2006.1708313	en
heal.identifier.secondary	http://dx.doi.org/10.1109/OMEMS.2006.1708313	en
heal.publicationDate	2006	en
heal.abstract	The paper describes two similar deformable mirrors that will demonstrate the feasibility of nanolaminate-based deformable mirrors over a wide range of size scales. Two complementary technologies: high-spatial-density electrostatic actuators and thin, flexible, lightweight nanolaminate foils are combined. Electrostatic actuation of MEMS-like structures provides densely-spaced, repeatable deflections on the order of 10 mum. Nanolaminate foils provide a mirror surface that is	en
heal.journalName	IEEE/LEOS International Conference on Optical	en
dc.identifier.doi	10.1109/OMEMS.2006.1708313	en