Computational fluid dynamics based shape optimization of a metal-organic chemical vapor deposition system using evolutionary algorithms

Xenidou, TC; Boudouvis, AG; Markatos, NC

dc.contributor.author	Xenidou, TC	en
dc.contributor.author	Boudouvis, AG	en
dc.contributor.author	Markatos, NC	en
dc.date.accessioned	2014-03-01T02:51:34Z
dc.date.available	2014-03-01T02:51:34Z
dc.date.issued	2008	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/35566
dc.relation.uri	http://www.scopus.com/inward/record.url?eid=2-s2.0-84858379642&partnerID=40&md5=b7ce59b85ebcc53da7e7699c424d71fc	en
dc.subject	Chemical process	en
dc.subject	Computational fluid dynamics	en
dc.subject	Evolutionary algorithm	en
dc.subject	Finite-volume method	en
dc.subject	Metal-organic chemical vapor deposition	en
dc.subject	Shape optimization	en
dc.subject	Showerhead design	en
dc.subject.other	Actual system	en
dc.subject.other	CFD analysis	en
dc.subject.other	CFD codes	en
dc.subject.other	Chemical process	en
dc.subject.other	Computational fluid dynamic (CFD)	en
dc.subject.other	Design limitations	en
dc.subject.other	Finite-volume	en
dc.subject.other	Gas delivery system	en
dc.subject.other	Nonuniformity	en
dc.subject.other	Optimal solutions	en
dc.subject.other	Parameterizations	en
dc.subject.other	Plate configuration	en
dc.subject.other	Showerhead	en
dc.subject.other	Computational fluid dynamics	en
dc.subject.other	Finite volume method	en
dc.subject.other	Metallorganic chemical vapor deposition	en
dc.subject.other	Shape optimization	en
dc.subject.other	Vapors	en
dc.subject.other	Evolutionary algorithms	en
dc.title	Computational fluid dynamics based shape optimization of a metal-organic chemical vapor deposition system using evolutionary algorithms	en
heal.type	conferenceItem	en
heal.publicationDate	2008	en
heal.abstract	The present paper demonstrates a computational method for shape optimization of a showerhead gas delivery system in a metal-organic chemical vapor deposition system. The method involves evolutionary algorithms in combination with CFD analysis. The growth rate and its spatial non-uniformity across the substrate are calculated through a finite-volume CFD code, while the task of minimizing the nonuniformity of the growth rate is assigned to a multilevel evolutionary algorithm. Design limitations resulting from the operation of the actual system are identified and different parameterizations of the shower plate are investigated. Optimal solutions are proposed and compared to the actual shower plate configuration. © 2008 Civil-Comp Press.	en
heal.journalName	Proceedings of the 6th International Conference on Engineering Computational Technology	en