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Computational fluid dynamics based shape optimization of a metal-organic chemical vapor deposition system using evolutionary algorithms

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dc.contributor.author Xenidou, TC en
dc.contributor.author Boudouvis, AG en
dc.contributor.author Markatos, NC en
dc.date.accessioned 2014-03-01T02:51:34Z
dc.date.available 2014-03-01T02:51:34Z
dc.date.issued 2008 en
dc.identifier.uri https://dspace.lib.ntua.gr/xmlui/handle/123456789/35566
dc.relation.uri http://www.scopus.com/inward/record.url?eid=2-s2.0-84858379642&partnerID=40&md5=b7ce59b85ebcc53da7e7699c424d71fc en
dc.subject Chemical process en
dc.subject Computational fluid dynamics en
dc.subject Evolutionary algorithm en
dc.subject Finite-volume method en
dc.subject Metal-organic chemical vapor deposition en
dc.subject Shape optimization en
dc.subject Showerhead design en
dc.subject.other Actual system en
dc.subject.other CFD analysis en
dc.subject.other CFD codes en
dc.subject.other Chemical process en
dc.subject.other Computational fluid dynamic (CFD) en
dc.subject.other Design limitations en
dc.subject.other Finite-volume en
dc.subject.other Gas delivery system en
dc.subject.other Nonuniformity en
dc.subject.other Optimal solutions en
dc.subject.other Parameterizations en
dc.subject.other Plate configuration en
dc.subject.other Showerhead en
dc.subject.other Computational fluid dynamics en
dc.subject.other Finite volume method en
dc.subject.other Metallorganic chemical vapor deposition en
dc.subject.other Shape optimization en
dc.subject.other Vapors en
dc.subject.other Evolutionary algorithms en
dc.title Computational fluid dynamics based shape optimization of a metal-organic chemical vapor deposition system using evolutionary algorithms en
heal.type conferenceItem en
heal.publicationDate 2008 en
heal.abstract The present paper demonstrates a computational method for shape optimization of a showerhead gas delivery system in a metal-organic chemical vapor deposition system. The method involves evolutionary algorithms in combination with CFD analysis. The growth rate and its spatial non-uniformity across the substrate are calculated through a finite-volume CFD code, while the task of minimizing the nonuniformity of the growth rate is assigned to a multilevel evolutionary algorithm. Design limitations resulting from the operation of the actual system are identified and different parameterizations of the shower plate are investigated. Optimal solutions are proposed and compared to the actual shower plate configuration. © 2008 Civil-Comp Press. en
heal.journalName Proceedings of the 6th International Conference on Engineering Computational Technology en


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