A comprehensive insight in the MOCVD of aluminum through interaction between reactive transport modeling and targeted growth experiments

Xenidou, TC; Prud'homme, N; Vahlas, C; Markatos, NC; Boudouvis, AG

dc.contributor.author	Xenidou, TC	en
dc.contributor.author	Prud'homme, N	en
dc.contributor.author	Vahlas, C	en
dc.contributor.author	Markatos, NC	en
dc.contributor.author	Boudouvis, AG	en
dc.date.accessioned	2014-03-01T02:51:54Z
dc.date.available	2014-03-01T02:51:54Z
dc.date.issued	2009	en
dc.identifier.issn	19385862	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/35739
dc.subject.other	Aluminum film	en
dc.subject.other	Computational Fluid Dynamics software	en
dc.subject.other	Dimethylethylamine alane	en
dc.subject.other	Experimental measurements	en
dc.subject.other	Growth mechanisms	en
dc.subject.other	Growth process	en
dc.subject.other	Heterogeneous chemical reaction	en
dc.subject.other	MOCVD	en
dc.subject.other	Operating parameters	en
dc.subject.other	Predictive models	en
dc.subject.other	Process output	en
dc.subject.other	Rate profiles	en
dc.subject.other	Reaction orders	en
dc.subject.other	Reactive transport modeling	en
dc.subject.other	Reactive transport models	en
dc.subject.other	Simulation result	en
dc.subject.other	Spatial uniformity	en
dc.subject.other	Subatmospheric pressures	en
dc.subject.other	Substrate temperature	en
dc.subject.other	Activation energy	en
dc.subject.other	Aluminum	en
dc.subject.other	Atmospheric movements	en
dc.subject.other	Atmospheric pressure	en
dc.subject.other	Computational fluid dynamics	en
dc.subject.other	Film growth	en
dc.subject.other	Grafting (chemical)	en
dc.subject.other	Synthesis (chemical)	en
dc.subject.other	Transport properties	en
dc.subject.other	Chemical vapor deposition	en
dc.title	A comprehensive insight in the MOCVD of aluminum through interaction between reactive transport modeling and targeted growth experiments	en
heal.type	conferenceItem	en
heal.identifier.primary	10.1149/1.3207580	en
heal.identifier.secondary	http://dx.doi.org/10.1149/1.3207580	en
heal.publicationDate	2009	en
heal.abstract	Growth experiments and reactive transport modeling were combined to formulate a comprehensive predictive model for aluminum growth from dimethylethylamine alane. The growth-rate profile was experimentally investigated as a function of substrate temperature. The reactive transport model, built under the computational fluid dynamics software PHOENICS, was used to reproduce the experimental measurements and to contribute to the understanding of the aluminum growth process, under sub-atmospheric pressure conditions. The growth mechanism of aluminum films was based on well established in literature reaction order and activation energy of homogeneous and heterogeneous chemical reactions. The reactive transport model was used further to investigate the effect of some key operating parameters on the process output. Simulation results are suggestive of modifications in the operating parameters that could enhance the growth rate and the spatial uniformity of the film thickness. © The Electrochemical Society.	en
heal.journalName	ECS Transactions	en
dc.identifier.doi	10.1149/1.3207580	en
dc.identifier.volume	25	en
dc.identifier.issue	8 PART 1	en
dc.identifier.spage	99	en
dc.identifier.epage	106	en