Self-aligned process for the development of surface stress capacitive biosensor arrays

Tsouti, V; Filippidou, M; Boutopoulos, C; Broutas, P; Zergioti, I; Chatzandroulis, S

dc.contributor.author	Tsouti, V	en
dc.contributor.author	Filippidou, M	en
dc.contributor.author	Boutopoulos, C	en
dc.contributor.author	Broutas, P	en
dc.contributor.author	Zergioti, I	en
dc.contributor.author	Chatzandroulis, S	en
dc.date.accessioned	2014-03-01T02:53:27Z
dc.date.available	2014-03-01T02:53:27Z
dc.date.issued	2011	en
dc.identifier.issn	18777058	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/36336
dc.subject	Biosensor array	en
dc.subject	Capacitive biosensors	en
dc.subject	DNA detection	en
dc.subject	Sensor fabrication	en
dc.subject.other	Biological interactions	en
dc.subject.other	Biosensor arrays	en
dc.subject.other	Boron implantation	en
dc.subject.other	Capacitive biosensors	en
dc.subject.other	Conductive membranes	en
dc.subject.other	DNA detection	en
dc.subject.other	Fabrication process	en
dc.subject.other	Flexible membranes	en
dc.subject.other	Fusion bonding	en
dc.subject.other	Membrane surface	en
dc.subject.other	Probe molecules	en
dc.subject.other	Process simplicity	en
dc.subject.other	Self aligned process	en
dc.subject.other	Self-aligned	en
dc.subject.other	Sensor fabrication	en
dc.subject.other	Surface stress	en
dc.subject.other	Boron	en
dc.subject.other	Fabrication	en
dc.subject.other	Membranes	en
dc.subject.other	Sensors	en
dc.subject.other	Surface properties	en
dc.subject.other	Biosensors	en
dc.title	Self-aligned process for the development of surface stress capacitive biosensor arrays	en
heal.type	conferenceItem	en
heal.identifier.primary	10.1016/j.proeng.2011.12.205	en
heal.identifier.secondary	http://dx.doi.org/10.1016/j.proeng.2011.12.205	en
heal.publicationDate	2011	en
heal.abstract	The fabrication process of a surface stress based capacitive biosensor array is presented. Flexible membranes and a fixed electrode on the substrate constitute the capacitive biosensors. Probe molecules are immobilized on the membrane surface and the surface stress variations during biological interactions force the membrane to deflect and effectively change the capacitance between the flexible membrane and the fixed substrate. The array consists of 60 sensors and thus is suitable for parallel sensing. Through the presented fabrication process, which is described in detail, sensitive membranes can be created. The process simplicity and the increased sensitivity of the biosensors are related to the use of boron implantation and the consequent self-aligned creation of the conductive membranes after the silicon fusion bonding technique. © 2011 Published by Elsevier Ltd.	en
heal.journalName	Procedia Engineering	en
dc.identifier.doi	10.1016/j.proeng.2011.12.205	en
dc.identifier.volume	25	en
dc.identifier.spage	835	en
dc.identifier.epage	838	en