Design, fabrication and characterisation of fully-etched TM grating coupler for photonic integrated system-in-package

Gili-De-Villasante, O; Tcheg, P; Wang, B; Suna, A; Giannoulis, G; Lazarous, I; Apostolopoulos, D; Avramopoulos, H; Pleros, N; Baus, M; Karl, M; Tekin, T

dc.contributor.author	Gili-De-Villasante, O	en
dc.contributor.author	Tcheg, P	en
dc.contributor.author	Wang, B	en
dc.contributor.author	Suna, A	en
dc.contributor.author	Giannoulis, G	en
dc.contributor.author	Lazarous, I	en
dc.contributor.author	Apostolopoulos, D	en
dc.contributor.author	Avramopoulos, H	en
dc.contributor.author	Pleros, N	en
dc.contributor.author	Baus, M	en
dc.contributor.author	Karl, M	en
dc.contributor.author	Tekin, T	en
dc.date.accessioned	2014-03-01T02:53:36Z
dc.date.available	2014-03-01T02:53:36Z
dc.date.issued	2012	en
dc.identifier.issn	0277786X	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/36443
dc.subject	Grating coupler	en
dc.subject	Plasmonics	en
dc.subject	Silicon photonics	en
dc.subject	System-in-package	en
dc.subject	Tb/s router	en
dc.subject.other	1550 nm	en
dc.subject.other	Coupling efficiency	en
dc.subject.other	Coupling loss	en
dc.subject.other	Etched gratings	en
dc.subject.other	Fiber-to-fiber loss	en
dc.subject.other	Filling factor	en
dc.subject.other	Gap widths	en
dc.subject.other	Grating couplers	en
dc.subject.other	Grating periods	en
dc.subject.other	Nanophotonic circuits	en
dc.subject.other	Plasmonics	en
dc.subject.other	Silicon photonics	en
dc.subject.other	SOI waveguides	en
dc.subject.other	Spectral response	en
dc.subject.other	Straight waveguides	en
dc.subject.other	System in package	en
dc.subject.other	TM modes	en
dc.subject.other	Optical fiber fabrication	en
dc.subject.other	Optical fibers	en
dc.subject.other	Optimization	en
dc.subject.other	Photonic integration technology	en
dc.subject.other	Photonics	en
dc.subject.other	Photonic devices	en
dc.title	Design, fabrication and characterisation of fully-etched TM grating coupler for photonic integrated system-in-package	en
heal.type	conferenceItem	en
heal.identifier.primary	10.1117/12.922846	en
heal.identifier.secondary	http://dx.doi.org/10.1117/12.922846	en
heal.identifier.secondary	84310G	en
heal.publicationDate	2012	en
heal.abstract	Grating couplers are the best solution for testing nano-photonic circuits. Their main benefit is that they allow access via an optical fiber from the top and therefore there is no need to dice the chip and prepare the facets crucially. In the PLATON project grating couplers were designed to couple TM mode into and out of the SOI waveguides. Simulations came up with a grating coupler layout capable of theoretical coupling losses lower than 3dB for 1550 nm in TM configuration. A fully etched grating structure was chosen for fabrication simplicity and the optimal filling factor was found. The structures were fabricated using proximity error correction (PEC) and show a uniform coupling efficiency for all couplers. Therefore they are well-suited for all applications which demand for stable fiber-to-chip coupling. The spectral response of the structures was measured from 1500 to 1580 nm with 2 nm step and measuring the fiber-to-fiber losses of three straight waveguides equipped with three grating couplers with different gap widths. The optimal grating period exhibits adequate coupling losses of 3.23 dB per coupler at 1557 nm, being therefore the most promising design. © 2012 SPIE.	en
heal.journalName	Proceedings of SPIE - The International Society for Optical Engineering	en
dc.identifier.doi	10.1117/12.922846	en
dc.identifier.volume	8431	en