Surface morphology, structure, and compositional characterization of MOCVD processed silicon oxynitride coatings for aqueous corrosion barriers

Papavasileiou, Paris; Παπαβασιλείου, Πάρις

dc.contributor.author	Papavasileiou, Paris	en
dc.contributor.author	Παπαβασιλείου, Πάρις	el
dc.date.accessioned	2020-12-17T08:43:33Z
dc.date.available	2020-12-17T08:43:33Z
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/52582
dc.identifier.uri	http://dx.doi.org/10.26240/heal.ntua.20280
dc.rights	Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ελλάδα	*
dc.rights	Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ελλάδα	*
dc.rights	Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ελλάδα	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/gr/	*
dc.subject	Chemical vapor deposition (CVD)	en
dc.subject	Silicon oxynitrides	en
dc.subject	Ellipsometry	en
dc.subject	FTIR	en
dc.subject	IBA methods	en
dc.subject	Απόθεση υμενίων χημικών ατμών (CVD)	el
dc.subject	Oξυνιτρίδια του πυριτίου	el
dc.subject	Ελλειψομετρία	el
dc.subject	Υπερυθρη φασματοσκοπία μετασχηματισμού Φουριέ	el
dc.subject	Μέθοδοι IBA	el
dc.subject	Solid state analysis	en
dc.subject	Ανάλυση στερεής φάσης	el
dc.subject	BOE test	en
dc.title	Surface morphology, structure, and compositional characterization of MOCVD processed silicon oxynitride coatings for aqueous corrosion barriers	en
dc.contributor.department	Τομέας Ανάλυσης, Σχεδιασμού και Ανάπτυξης Διεργασιών και Συστημάτων	el
heal.type	bachelorThesis
heal.classification	Μηχανική των υλικών	el
heal.classification	Μηχανική διεργασιών	el
heal.classification	Process engineering	en
heal.classification	Material Science	en
heal.language	en
heal.access	free
heal.recordProvider	ntua	el
heal.publicationDate	2020-10-05
heal.abstract	The present thesis was conducted under the Erasmus+ framework for education, in collaboration between the School of Chemical Engineering of the National Technical University of Athens and the École Nationale Supérieure des Ingénieurs en Arts Chimiques et Technologiques of Institut National Polytechnique de Toulouse. The deposition of silica-based materials is widely used in numerous industrial sectors, including microelectronics and pharmaceutics. Depending on their target-application, these materials need to fulfill specific requirements in terms of mechanical properties, durability, and composition. More specifically, the implementation of innovative silicon oxynitrides (SiOxNy) coatings in pharmaceutical applications dictates good aqueous barrier and anti-diffusion properties, as well as effective corrosion resistance. In the present work, a study of the structure and composition of the produced thin films was conducted. First, by using spectrometric ellipsometry, the thickness and composition of the samples was measured. The ellipsometry results were obtained using a two-phase Bruggeman effective medium approximation model (BEMA model), considering the oxynitride films to consist of silica (SiO2) and silicon nitride (Si3N4) building blocks. Towards the end of this work, a 3-phase BEMA model was also used, in order to incorporate carbon in the compositional results. Then, to acquire in-depth information regarding the chemical species present in the thin films, Fourier-Transform infrared spectroscopy was utilised. Several chemical species were detected and, depending on the deposition conditions and sample position in the reactor, different species and spectral characteristics were observed. The position and intensity of the Si-O-Si TO3 stretching mode and the Si-N was thoroughly analysed as a function of oxygen flow and temperature parameters. Using both ellipsometry and FTIR analyses, the evolution of the films structure and composition was tracked along the length of the reactor. Samples of the same experiment were compared in order to understand the effect of sample position in the film’s final structure. Then, samples from different experiments were compared so that the effect of the applied deposition conditions could be studied. By using the available compositional results acquired through three distinct Ion beam analysis (IBA) methods, namely Rutherford Backscattering Spectroscopy (RBS), Elastic Recoil Detection Analysis (ERDA) and Nuclear Reaction Analysis (NRA), the several trends observed in the FTIR and ellipsometry studies could be verified. Additionally, new trends regarding other elements of the film, like carbon and hydrogen could be observed in more detail. Via the use of the results obtained by IBA, the 3-phase BEMA ellipsometry model mentioned above was calibrated. Finally, a chemical etching test was performed on the films using a buffer oxide etch (BOE) solution through which the performance of the films against corrosion were assessed. This performance was then correlated with the nitrogen content in the film.	en
heal.sponsor	Erasmus+	el
heal.advisorName	Boudouvis, Andreas	en
heal.committeeMemberName	Vahlas, Constantin	en
heal.committeeMemberName	Argirusis, Christos	en
heal.academicPublisher	Εθνικό Μετσόβιο Πολυτεχνείο. Σχολή Χημικών Μηχανικών. Τομέας Ανάλυσης, Σχεδιασμού και Ανάπτυξης Διεργασιών και Συστημάτων (ΙΙ)	el
heal.academicPublisherID	ntua
heal.numberOfPages	92 p.	en
heal.fullTextAvailability	false