Stress characteristics of suspended porous silicon microstructures on silicon

Anestou, K; Papadimitriou, D; Tsamis, C; Nassiopoulou, AG

dc.contributor.author	Anestou, K	en
dc.contributor.author	Papadimitriou, D	en
dc.contributor.author	Tsamis, C	en
dc.contributor.author	Nassiopoulou, AG	en
dc.date.accessioned	2014-03-01T01:23:08Z
dc.date.available	2014-03-01T01:23:08Z
dc.date.issued	2005	en
dc.identifier.issn	17426588	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/16825
dc.subject	Microstructures	en
dc.subject	Porous Silicon	en
dc.title	Stress characteristics of suspended porous silicon microstructures on silicon	en
heal.type	journalArticle	en
heal.identifier.primary	10.1088/1742-6596/10/1/076	en
heal.identifier.secondary	http://dx.doi.org/10.1088/1742-6596/10/1/076	en
heal.publicationDate	2005	en
heal.abstract	The mechanical properties of porous silicon (PS) microstructures on crystalline silicon (c-Si) were investigated. Micro-Raman spectroscopy was applied to probe stresses in PS micro-hotplates in the form of cantilevers. Important information was obtained for the stress distribution across cantilevers supported at one edge. The structural stability of thermally treated PS after long time exposure in air was also investigated. The results can be used for optimization of microsensors based on the PS microstructures. © 2005 IOP Publishing Ltd.	en
heal.journalName	Journal of Physics: Conference Series	en
dc.identifier.doi	10.1088/1742-6596/10/1/076	en
dc.identifier.volume	10	en
dc.identifier.issue	1	en
dc.identifier.spage	309	en
dc.identifier.epage	312	en