Stress characteristics of suspended porous silicon microstructures on silicon

Anestou, K; Papadimitriou, D; Tsamis, C; Nassiopoulou, AG

URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/16825

Date: 2005

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Δημοσιεύσεις μελών Δ.Ε.Π. σε περιοδικά [21402]

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