Impact of structural parameters on the performance of silicon micromachined capacitive pressure sensors

Tsouti, V; Bikakis, G; Chatzandroulis, S; Goustouridis, D; Normand, P; Tsoukalas, D

dc.contributor.author	Tsouti, V	en
dc.contributor.author	Bikakis, G	en
dc.contributor.author	Chatzandroulis, S	en
dc.contributor.author	Goustouridis, D	en
dc.contributor.author	Normand, P	en
dc.contributor.author	Tsoukalas, D	en
dc.date.accessioned	2014-03-01T01:26:27Z
dc.date.available	2014-03-01T01:26:27Z
dc.date.issued	2007	en
dc.identifier.issn	0924-4247	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/18084
dc.subject	Analytical modeling	en
dc.subject	Capacitive sensor	en
dc.subject	Finite element	en
dc.subject	Pressure sensor	en
dc.subject.classification	Engineering, Electrical & Electronic	en
dc.subject.classification	Instruments & Instrumentation	en
dc.subject.other	Capacitance	en
dc.subject.other	Diaphragms	en
dc.subject.other	Finite element method	en
dc.subject.other	Mathematical models	en
dc.subject.other	Micromachining	en
dc.subject.other	Silicon	en
dc.subject.other	Analytical modeling	en
dc.subject.other	Capacitive sensors	en
dc.subject.other	Capacitive silicon pressure sensors	en
dc.subject.other	Pressure sensors	en
dc.title	Impact of structural parameters on the performance of silicon micromachined capacitive pressure sensors	en
heal.type	journalArticle	en
heal.identifier.primary	10.1016/j.sna.2007.02.015	en
heal.identifier.secondary	http://dx.doi.org/10.1016/j.sna.2007.02.015	en
heal.language	English	en
heal.publicationDate	2007	en
heal.abstract	In his paper we examine with analytical and finite element modeling the influence of structural parameters on the performance of capacitive silicon pressure sensors. It is found that device behavior is dependant on the substrate deformation as well as the foundation of the sensor diaphragm. Accurate results may only be obtained when all parameters and residual stresses are included. (C) 2007 Elsevier B.V. All rights reserved.	en
heal.publisher	ELSEVIER SCIENCE SA	en
heal.journalName	Sensors and Actuators, A: Physical	en
dc.identifier.doi	10.1016/j.sna.2007.02.015	en
dc.identifier.isi	ISI:000247735700004	en
dc.identifier.volume	137	en
dc.identifier.issue	1	en
dc.identifier.spage	20	en
dc.identifier.epage	24	en