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Impact of structural parameters on the performance of silicon micromachined capacitive pressure sensors

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Impact of structural parameters on the performance of silicon micromachined capacitive pressure sensors

Tsouti, V; Bikakis, G; Chatzandroulis, S; Goustouridis, D; Normand, P; Tsoukalas, D
URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/18084
Date: 2007

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