Contact edge roughness metrology in nanostructures: Frequency analysis and variations

Vijaya-Kumar, MK; Constantoudis, V; Gogolides, E; Pret, AV; Gronheid, R

dc.contributor.author	Vijaya-Kumar, MK	en
dc.contributor.author	Constantoudis, V	en
dc.contributor.author	Gogolides, E	en
dc.contributor.author	Pret, AV	en
dc.contributor.author	Gronheid, R	en
dc.date.accessioned	2014-03-01T02:53:35Z
dc.date.available	2014-03-01T02:53:35Z
dc.date.issued	2012	en
dc.identifier.issn	01679317	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/36433
dc.subject	Contact edge roughness (CER)	en
dc.subject	Contact hole roughness (CHR)	en
dc.subject	Height-height correlation function	en
dc.subject	Image magnification	en
dc.subject	Image noise	en
dc.subject	Power spectrum	en
dc.subject	Scanning electron microscopy (SEM)	en
dc.subject.other	Contact edge roughness	en
dc.subject.other	Contact holes	en
dc.subject.other	Height-height correlation functions	en
dc.subject.other	Image magnification	en
dc.subject.other	Image noise	en
dc.subject.other	Scanning electrons	en
dc.subject.other	Power spectrum	en
dc.subject.other	Scanning electron microscopy	en
dc.subject.other	Frequency estimation	en
dc.title	Contact edge roughness metrology in nanostructures: Frequency analysis and variations	en
heal.type	conferenceItem	en
heal.identifier.primary	10.1016/j.mee.2011.05.013	en
heal.identifier.secondary	http://dx.doi.org/10.1016/j.mee.2011.05.013	en
heal.publicationDate	2012	en
heal.abstract	A methodology for the evaluation and characterization of contact edge roughness using top-down images from scanning electron microscope is presented. Emphasis is given on the frequency and spatial aspects of CER and the estimation of the power spectrum and height-height correlation function. We also estimate the contribution of local and global process variations on the CER metrics of real contact holes with nominal critical dimension 50 nm as well as the effects of image magnification and noise smoothing filter. We find that local process variations have stronger contribution to the uncertainty of CD and CER parameters than image magnification and noise smoothing with the latter having the smallest impact. © 2011 Elsevier B.V. All rights reserved.	en
heal.journalName	Microelectronic Engineering	en
dc.identifier.doi	10.1016/j.mee.2011.05.013	en
dc.identifier.volume	90	en
dc.identifier.spage	126	en
dc.identifier.epage	130	en