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Contact edge roughness metrology in nanostructures: Frequency analysis and variations
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Contact edge roughness metrology in nanostructures: Frequency analysis and variations
Vijaya-Kumar, MK
;
Constantoudis, V
;
Gogolides, E
;
Pret, AV
;
Gronheid, R
URI:
https://dspace.lib.ntua.gr/xmlui/handle/123456789/36433
Date:
2012
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