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Parameters influencing the flatness and stability of capacitive pressure sensors fabricated with wafer bonding

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Parameters influencing the flatness and stability of capacitive pressure sensors fabricated with wafer bonding

Goustouridis, D; Tsoukalas, D; Normand, P; Kontos, AG; Raptis, Y; Anastassakis, E
URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/13297
Date: 1999

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