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Characterization and simulation of surface and line-edge roughness in photoresists

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Characterization and simulation of surface and line-edge roughness in photoresists

Constantoudis, V; Gogolides, E; Patsis, GP; Tserepi, A; Valamontes, ES
URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/13983
Date: 2001

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