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Influence of Ge implantation on the mechanical properties of polycrystalline silicon microstructures

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Influence of Ge implantation on the mechanical properties of polycrystalline silicon microstructures

Polymenakos, S; Stergiou, VC; Kontos, AG; Tsamis, C; Raptis, YS; Tsoukalas, D
URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/14739
Date: 2002

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