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Investigation of deep implanted fluorine channeling profiles in silicon using resonant NRA

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Investigation of deep implanted fluorine channeling profiles in silicon using resonant NRA

Kokkoris, M; Perdikakis, G; Vlastou, R; Papadopoulos, CT; Aslanoglou, XA; Posselt, M; Grotzschel, R; Harissopulos, S; Kossionides, S
URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/15365
Date: 2003

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