HEAL DSpace

Properties of polycrystalline silicon films obtained by rapid thermal processing for micromechanical sensors

DSpace/Manakin Repository

Properties of polycrystalline silicon films obtained by rapid thermal processing for micromechanical sensors

Girginoudi, D; Mitsinakis, A; Kotsani, M; Georgoulas, N; Thanailakis, A; Kontos, AG; Stergiou, VC; Raptis, YS
URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/16169
Date: 2004

Show full item record

Files in this item

Files Size Format View

There are no files associated with this item.

This item appears in the following Collection(s)