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A stochastic photoresist-polymer dissolution model combining the percolation and critical ionization models

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A stochastic photoresist-polymer dissolution model combining the percolation and critical ionization models

Sarris, V; Patsis, GP; Constantoudis, V; Boudouvis, AG; Gogolides, E
URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/16361
Date: 2005

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