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Laser annealing of plasma implanted boron for ultra-shallow junctions in Silicon

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Laser annealing of plasma implanted boron for ultra-shallow junctions in Silicon

Florakis, A; Tsoukalas, D; Zergioti, I; Giannakopoulos, K; Dimitrakis, P; Papazoglou, DG; Bennassayag, G; Bourdon, H; Halimaoui, A
URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/17330
Date: 2006

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