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Optimization of anisotropically etched silicon surface-relief gratings for substrate-mode optical interconnects

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Optimization of anisotropically etched silicon surface-relief gratings for substrate-mode optical interconnects

Wu, S-D; Gaylord, TK; Maikisch, JS; Glytsis, EN
URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/17448
Date: 2006

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