HEAL DSpace

Pattern matching, simulation, and metrology of complex layouts fabricated by electron beam lithography

DSpace/Manakin Repository

Pattern matching, simulation, and metrology of complex layouts fabricated by electron beam lithography

Tsikrikas, N; Drygiannakis, D; Patsis, GP; Raptis, I; Gerardino, A; Stavroulakis, S; Voyiatzis, E
URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/18269
Date: 2007

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