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Stochastic simulation of material and process effects on the patterning of complex layouts

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Stochastic simulation of material and process effects on the patterning of complex layouts

Tsikrikas, N; Drygiannakis, D; Patsis, GP; Raptis, I; Stavroulakis, S; Voyiatzis, E
URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/18386
Date: 2007

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