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Stochastic simulation studies of molecular resists for the 32 nm technology node

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Stochastic simulation studies of molecular resists for the 32 nm technology node

Drygiannakis, D; Patsis, GP; Tsikrikas, N; Kokkoris, G; Boudouvis, A; Raptis, I; Gogolides, E; Argitis, P
URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/19174
Date: 2008

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