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Stochastic modeling and simulation of photoresist surface and line-edge roughness evolution

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Stochastic modeling and simulation of photoresist surface and line-edge roughness evolution

Patsis, GP; Drygiannakis, D; Constantoudis, V; Raptis, I; Gogolides, E
URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/20794
Date: 2010

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