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Silicon nanocrystal formation in thin thermal-oxide films by very-low energy Si + ion implantation

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Silicon nanocrystal formation in thin thermal-oxide films by very-low energy Si + ion implantation

Normand, P; Tsoukalas, D; Kapetanakis, E; Berg, J; Armour, D; Stoemenos, J
URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/24727
Date: 1997

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