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Fabrication of Si nano-wires using anisotropic dry and wet etching

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Fabrication of Si nano-wires using anisotropic dry and wet etching

Normand, P; Tsoukalas, D; Aidinis, C; Tserepi, A; Kouvatsos, D; Kapetanakis, E
URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/25014
Date: 1998

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