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A comparative study of composition, structure and elastic properties of boron nitride films deposited by magnetron and ion beam sputtering
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A comparative study of composition, structure and elastic properties of boron nitride films deposited by magnetron and ion beam sputtering
Logothetidis, S
;
Charitidis, C
;
Patsalas, P
;
Kehagias, T
URI:
https://dspace.lib.ntua.gr/xmlui/handle/123456789/25312
Date:
1999
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Δημοσιεύσεις μελών Δ.Ε.Π. σε περιοδικά
[21402]
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