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A Masking Approach for Anisotropic Silicon Wet Etching

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A Masking Approach for Anisotropic Silicon Wet Etching

Normand, P; Beltsios, K; Tserepi, A; Aidinis, K; Tsoukalas, D; Cardinaud, C
URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/26060
Date: 2001

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