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Formation of 2-D arrays of semiconductor nanocrystals or semiconductor-rich nanolayers by very low-energy Si or Ge ion implantation in silicon oxide films

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Formation of 2-D arrays of semiconductor nanocrystals or semiconductor-rich nanolayers by very low-energy Si or Ge ion implantation in silicon oxide films

Normand, P; Beltsios, K; Kapetanakis, E; Tsoukalas, D; Travlos, T; Stoemenos, J; Berg, J; Zhang, S; Vieu, C; Launois, H; Gautier, J; Jourdan, F; Palun, L
URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/26105
Date: 2001

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