Simulation of fluorocarbon plasma etching SiO2 structures

Kokkoris, G; Gogolides, E; Boudouvis, AG

URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/26261

Date: 2001

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Δημοσιεύσεις μελών Δ.Ε.Π. σε περιοδικά [21402]

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