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Depth positioning of silicon nanoparticles created by Si ULE implants in ultrathin SiO2

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Depth positioning of silicon nanoparticles created by Si ULE implants in ultrathin SiO2

Assayag, G; Carrada, M; Bonafos, C; Chassaing, D; Claverie, A; Normand, P; Tsoukalas, D; Dimitrakis, P; Kapetanakis, E; Soncini, V; Fanciulli, A; Perego, M
URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/26330
Date: 2002

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