Fabrication of single crystal Si cantilevers using a dry release process and application in a capacitive-type humidity sensor

Chatzandroulis, S; Tserepi, A; Goustouridis, D; Normand, P; Tsoukalas, D

dc.contributor.author	Chatzandroulis, S	en
dc.contributor.author	Tserepi, A	en
dc.contributor.author	Goustouridis, D	en
dc.contributor.author	Normand, P	en
dc.contributor.author	Tsoukalas, D	en
dc.date.accessioned	2014-03-01T01:51:32Z
dc.date.available	2014-03-01T01:51:32Z
dc.date.issued	2002	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/26351
dc.subject	Humidity Sensor	en
dc.subject	Microstructures	en
dc.subject	Polymer Film	en
dc.subject	Single Crystal	en
dc.title	Fabrication of single crystal Si cantilevers using a dry release process and application in a capacitive-type humidity sensor	en
heal.type	journalArticle	en
heal.identifier.primary	10.1016/S0167-9317(02)00448-3	en
heal.identifier.secondary	http://dx.doi.org/10.1016/S0167-9317(02)00448-3	en
heal.publicationDate	2002	en
heal.abstract	A process is presented for the fabrication of suspended silicon microstructures, such as cantilevers and open type membranes, constituting the movable plate of a capacitor at a small distance over the silicon substrate. The process relies on the silicon fusion bonding of two wafers and features dry release of the suspended silicon structures at the final stage of the process,	en
heal.journalName	Microelectronic Engineering	en
dc.identifier.doi	10.1016/S0167-9317(02)00448-3	en