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Fabrication of single crystal Si cantilevers using a dry release process and application in a capacitive-type humidity sensor

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Fabrication of single crystal Si cantilevers using a dry release process and application in a capacitive-type humidity sensor

Chatzandroulis, S; Tserepi, A; Goustouridis, D; Normand, P; Tsoukalas, D
URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/26351
Date: 2002

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