Effect of ion energy and dose on the positioning of 2D-arrays of Si nanocrystals ion beam synthesised in thin SiO 2 layers

Carrada, M; Cherkashin, N; Bonafos, C; Benassayag, G; Chassaing, D; Normand, P; Tsoukalas, D; Soncini, V; Claverie, A

Date: 2003

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