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MOS memory structures by very-low-energy-implanted Si in thin SiO 2

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MOS memory structures by very-low-energy-implanted Si in thin SiO 2

Dimitrakis, P; Kapetanakis, E; Normand, P; Skarlatos, D; Tsoukalas, D; Beltsios, K; Claverie, A; Benassayag, G; Bonafos, C; Chassaing, D; Carrada, M; Soncini, V
URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/26719
Date: 2003

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