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Atomic-Scale Mechanisms for Low-NIEL Dopant-Type Dependent Damage in Si

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Atomic-Scale Mechanisms for Low-NIEL Dopant-Type Dependent Damage in Si

Beck, M; Tsetseris, L; Caussanel, M; Schrimpf, R; Fleetwood, D; Pantelides, S
URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/27507
Date: 2006

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