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Computational analysis of horizontal cold wall CVD reactors at low pressure: Application to tungsten deposition from pyrolysis of W(CO)6

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Computational analysis of horizontal cold wall CVD reactors at low pressure: Application to tungsten deposition from pyrolysis of W(CO)6

Xenidou, TC; Koukou, MK; Boudouvis, AG; Markatos, NC
URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/30620
Date: 2001

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