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Formation of Silicon Ultra Shallow Junction by nonmelt excimer laser treatment

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Formation of Silicon Ultra Shallow Junction by nonmelt excimer laser treatment

Florakis, A; Papadimitriou, A; Chatzipanagiotis, N; Tsoukalas, D; Misra, N; Grigoropoulos, C
URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/32582
Date: 2009

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