Formation of silicon ultra shallow junction by non-melt excimer laser treatment

Florakis, A; Papadimitriou, A; Chatzipanagiotis, N; Misra, N; Grigoropoulos, C; Tsoukalas, D

URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/32862

Date: 2010

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