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Influence of the restructuring process on the phosphorus doping near the polysilicon/SiO2 interface on silicon

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Influence of the restructuring process on the phosphorus doping near the polysilicon/SiO2 interface on silicon

Gaiseanu, F; Kurger, D; Dimitriadis, C; Stocmenos, J; Postolache, C; Tsoukalas, D; Tsoi, E; Goustouridis, D
URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/33836
Date: 1997

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