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Stress control for process optimization of the capacitive pressure sensors for biomedical applications achieved by surface micromachining technology

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Stress control for process optimization of the capacitive pressure sensors for biomedical applications achieved by surface micromachining technology

Gaiseanu, F; Postolache, C; Dascalu, D; Esteve, J; Tsoukalas, D; Jachowicz, R; Badoiu, A; Vasile, E
URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/33984
Date: 1998

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