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UV sub-ps laser pulse patterning of Mo/Si and W/Si multilayers for soft X-ray gratings

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UV sub-ps laser pulse patterning of Mo/Si and W/Si multilayers for soft X-ray gratings

Majkova, E; Luby, S; Chushkin, Y; Jergel, M; Papazoglou, D; Manousaki, A; Fotakis, C; Zergioti, I; Sobota, J
URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/34970
Date: 2005

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