Shape optimization of a showerhead system for the control of growth uniformity in a MOCVD reactor using CFD-based evolutionary algorithms

Xenidou, TC; Prud'homme, N; Aloui, L; Vahlas, C; Markatos, NC; Boudouvis, AG

dc.contributor.author	Xenidou, TC	en
dc.contributor.author	Prud'homme, N	en
dc.contributor.author	Aloui, L	en
dc.contributor.author	Vahlas, C	en
dc.contributor.author	Markatos, NC	en
dc.contributor.author	Boudouvis, AG	en
dc.date.accessioned	2014-03-01T02:52:06Z
dc.date.available	2014-03-01T02:52:06Z
dc.date.issued	2009	en
dc.identifier.issn	19385862	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/35848
dc.subject.other	CFD codes	en
dc.subject.other	CFD simulations	en
dc.subject.other	Design method	en
dc.subject.other	Finite-volume	en
dc.subject.other	Gas delivery system	en
dc.subject.other	Gasphase	en
dc.subject.other	MOCVD reactor	en
dc.subject.other	Near-optimal solutions	en
dc.subject.other	Numerical predictions	en
dc.subject.other	Optimal design	en
dc.subject.other	Showerhead	en
dc.subject.other	Spatial variations	en
dc.subject.other	Steady state	en
dc.subject.other	Chemical vapor deposition	en
dc.subject.other	Computational fluid dynamics	en
dc.subject.other	Coupled circuits	en
dc.subject.other	Laminar flow	en
dc.subject.other	Optimal systems	en
dc.subject.other	Shape optimization	en
dc.subject.other	Surface chemistry	en
dc.subject.other	Evolutionary algorithms	en
dc.title	Shape optimization of a showerhead system for the control of growth uniformity in a MOCVD reactor using CFD-based evolutionary algorithms	en
heal.type	conferenceItem	en
heal.identifier.primary	10.1149/13207705	en
heal.identifier.secondary	http://dx.doi.org/10.1149/13207705	en
heal.publicationDate	2009	en
heal.abstract	A steady state, laminar flow coupled with heat transfer, gas-phase and surface chemistry, is numerically solved for the optimal design of a showerhead gas delivery system in an axis-symmetrical MOCVD reactor. The design method involves an evolutionary algorithm based on CFD simulations. A finite-volume CFD code for aluminum growth provides the numerical predictions of the growth rate and its spatial variation over the substrate. A multilevel evolutionary algorithm is used to continuously adjust the shape of the shower plate so as to minimize the spatial variation of the growth rate. A 5-variable parameterization of the shower plate is investigated and a near-optimal solution is proposed and compared to the original configuration of the shower plate. © The Electrochemical Society.	en
heal.journalName	ECS Transactions	en
dc.identifier.doi	10.1149/13207705	en
dc.identifier.volume	25	en
dc.identifier.issue	8 PART 2	en
dc.identifier.spage	1053	en
dc.identifier.epage	1060	en