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Shape optimization of a showerhead system for the control of growth uniformity in a MOCVD reactor using CFD-based evolutionary algorithms

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Shape optimization of a showerhead system for the control of growth uniformity in a MOCVD reactor using CFD-based evolutionary algorithms

Xenidou, TC; Prud'homme, N; Aloui, L; Vahlas, C; Markatos, NC; Boudouvis, AG
URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/35848
Date: 2009

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