HEAL DSpace

Depth profiling of high energy nitrogen ions implanted in the 〈1 0 0〉, 〈1 1 0〉 and randomly oriented silicon crystals

DSpace/Manakin Repository

Depth profiling of high energy nitrogen ions implanted in the 〈1 0 0〉, 〈1 1 0〉 and randomly oriented silicon crystals

Eric, M; Petrovic, S; Kokkoris, M; Lagoyannis, A; Paneta, V; Harissopulos, S; Telecki, I
URI: https://dspace.lib.ntua.gr/xmlui/handle/123456789/29685
Date: 2012

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